EE 5183 - Micro and Nano Fabrication

Basic steps of fabrication used in the manufacturing of micro and nanoscale electronic devices. Si BiCMOS technology to be relevant to industry applications, while novel fabrication tools and processes used in the nanoscale engineering also included. Nanotechnology materials, devices and technologies that serve computing, communication and medical applications. Example applications chosen from CMOS chips, novel nanomaterials, MEMS/NEMS, photonics, and biomedical engineering.

Requisites

Credit Hours: 3.0
Repeat/Retake Information: May not be retaken.

Lecture/Lab Hours: 3.0 lecture

Eligible grades: A-F,WP,WF,FN,FS,AU,I