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Dec 30, 2024
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EE 4183 - Micro and Nano Fabrication Basic steps of fabrication used in the manufacturing of micro and nanoscale electronic devices. Si BiCMOS technology to be relevant to industry applications, while novel fabrication tools and processes used in the nanoscale engineering also included. Nanotechnology materials, devices and technologies that serve computing, communication and medical applications. Example applications chosen from CMOS chips, novel nanomaterials, MEMS/NEMS, photonics, and biomedical engineering.
Requisites: CHEM 151 or 1510 and PHYS 2051 Credit Hours: 3.0 Repeat/Retake Information: May be retaken two times excluding withdrawals, but only last course taken counts. Lecture/Lab Hours: 3.0 lecture Eligible grades: A-F,WP,WF,FN,FS,AU,I
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