Apr 16, 2021  
OHIO University Undergraduate Catalog 2020-21 
    
OHIO University Undergraduate Catalog 2020-21
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EE 4183 - Micro and Nano Fabrication


Basic steps of fabrication used in the manufacturing of micro and nanoscale electronic devices. Si BiCMOS technology to be relevant to industry applications, while novel fabrication tools and processes used in the nanoscale engineering also included. Nanotechnology materials, devices and technologies that serve computing, communication and medical applications. Example applications chosen from CMOS chips, novel nanomaterials, MEMS/NEMS, photonics, and biomedical engineering.

Requisites: CHEM 151 or 1510 and PHYS 2051
Credit Hours: 3
Repeat/Retake Information: May be retaken two times excluding withdrawals, but only last course taken counts.
Lecture/Lab Hours: 3.0 lecture
Grades: Eligible Grades: A-F,WP,WF,WN,FN,AU,I
Learning Outcomes:
  • Appreciation of basic clean-room tools, safe operating practices and occupational hazards in micro-fabrication processes.
  • Foster an appreciation of the interdisciplinary forces and trends that guide the development of nano-scale science and integration of technology today.
  • Improving literature surveying, critical analysis and presentation skills of students using the state-of-the-art developments in micro/nano engineering and technology.
  • Review of background material required for following developments in integrative micro and nano-engineering research that encapsulate electronics, material science, MEMS, biomedical sciences and optics.
  • Understanding of basic steps in semiconductor device fabrication and solid-state material characterization techniques, and their theoretical framework.



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